Specialization laboratory 1100-5INZ14

The laboratory provides a unique opportunity for students to learn and perform the most important semiconductor processing techniques in our in-house university-scale clean room. The final goal of the laboratory is to fabricate a nanostructure. The actual design, choice of material, and field of application of the nanostructure will be determined by the students together with the supervisor at the beginning of the course.

The laboratory will take place in the Nanotech Laboratory of the Solid State Physics Department of the Faculty of Physics. It will consist of one weekly four-hour block, plus additional individual meetings in the Nanotech Laboratory or other laboratories of the Solid State Physics Department.

Webpage of the laboratory:
https://nanotech.fuw.edu.pl

Within the framework of the course, students will have access to the following infrastructure:
• Clean room facilities
• Optical lithography setups (conventional mask aligner and maskless optical setup)
• Scanning Electron Microscope / Focused Ion Beam
• Electron Beam Lithography
• Electron Beam Evaporator
• Reactive Ion Etching (ICP)
• Atomic Force Microscope
• Profilometer (contact)
• 2D Materials Transfer Stage
• Electrical Measurements using a Probe Station

The actual choice of equipment used will depend on the design and requirements of the fabricated nanostructure.